May 13, 2026

Innovation story

John Munck Award 2026 - Ultraviolet vacuum solution

The winners are awarded for the development of a visionary extreme ultraviolet vacuum solution which delivers enhanced pumping performance with reduced power consumption.
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The John Munck Award, established in 1988, is presented each year to reward the person or group of people who have produced the best innovative technical development contribution during the year.

This year, the award goes to Richard Salloum​, Dorothy Noh, Jacob Lee​, Scott Rhim​and Siva Kailasam.

Glyn Fargher, Anthony Salisbury, Matthew Stages, John Stewart and Kyle Weirauch in the Industrial Technique Business Area.

The team receives the award for the development of a visionary extreme ultraviolet vacuum solution which delivers enhanced pumping performance with reduced power consumption, lowered nitrogen use, smaller footprint, and improved serviceability in a seamless integration with the world´s most advanced lithography systems.

Motivation for the award

Watch the video about the winners

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