Atlas Copco has acquired a technology for process diagnostics and control in the semiconductor industry

August 4, 2020

Nacka, Sweden, August 4, 2020: Atlas Copco has acquired the technology and operating assets of iTrap. The iTrap is an ion trap mass spectrometer instrument capable of highly sensitive real time gas analysis. The instrument is used for diagnostics or process control in semiconductor process chambers.

The business is located in Oberkochen, in southern Germany, and has been part of ZEISS Venture. A few employees will join Atlas Copco.

“The insights the technology can bring into the chemical environment in process chambers, in close to real time, will deliver significant value to our customers,” said Geert Follens, Business Area President Vacuum Technique. “We also see possibilities for synergies with other products used in process chambers”. The purchase price is not material relative to Atlas Copco’s market capitalization and is not disclosed.

The company will become part of the Semiconductor Chamber Solutions Division in the Business Area Vacuum Technique.

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Atlas Copco Group
Great ideas accelerate innovation. At Atlas Copco we have been turning industrial ideas into business-critical benefits since 1873. By listening to our customers and knowing their needs, we deliver value and innovate with the future in mind.

Atlas Copco is based in Stockholm, Sweden with customers in more than 180 countries. In 2019, Atlas Copco had revenues of BSEK104 (BEUR 10) and at year end about 39 000 employees.